The Gas Purification System providing sub-ppb or ppt performance is designed to remove impurities in a process gas through use of high qualified catalyst & adsorption. These materials provide wholly purification in using dual beds (columns. vessels) without downtime. Two columns alternate between purification and regeneration modes. Outlet impurity levels are reduced to below sub-ppb or ppt concentration. The purifiers use dual columns processes designed to provide ultra-high purified gases for semiconductor. flat panel display, LED and solar cell applications. as well as it can be manufactured from high flow rates of 5 to 10,000 Nm3/h and optionally high pressure up to 200barg(3000psig). Gas Purified: Ammonia (NH3), Argon (Ar), Helium (He), Hydrogen(H2), Nitrogen(N2), Oxygen(O2) Rare Gas for Kr, Ne, Xe and Special gases for Cl2, CF4, C2F6, SF6